Cross reference for Operation ontology classes, properties and dataproperties back to ToC

This section provides details for each class and property defined by Operation ontology.

Classes

Chemical polishingc back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/ChemicalPolishing

The chemical polishing process or chemical mechanical planarization (CMP) is a process whereby a chemical reaction increases the mechanical removal rate of a material. CMP is commonly used to polish off high spots on wafers or films deposited on wafers, flattening the film or wafer, referred to as planarization. The chemical reaction that increases the mechanical removal rate is commonly tailored to provide a higher removal rate of one material versus another material. The chemical action in CMP helps to achieve higher selectivity's of one material to another than a strictly mechanical process would provide.
has super-classes
Workshop c

Cosntant resistance regionc back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/Triode/ConstantResistanceRegion

has super-classes
On-state region c

Current WIPc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#CurrentWIP

“Current WIP” entity describes the actual material distribution in the supply chain.
is in range of
has current WIP op

Demand snapshotc back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/DemandSnapshot

The “Demand” entity stores redundant demand at every product level.
is in range of
has demand op

Depletion modec back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/DepletionMode

A transistor that is normally closed (on), allowing current to pass, but is triggered to open (off) and impede current. Contrast with "enhancement mode", wherein the transistor is normally open (off), but is triggered to close (on).
has super-classes
Operation mode c

Depositionc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Deposition

The deposition process, or chemical vapor deposition (CVD) is a process whereby a fiolm is deposited by reacting chemicals together in the gaseous or vapor phase to form a film. The gases or vapors utilized for CVD are compounds that contain the element to be deposited and that may be inducted to react with a substrate or other gas(es) to deposit a film. The CVD reactoin may be thermally activated, plasma induced, plasma enhanced CVD or activated by light in photon induced CVD.
has super-classes
Workshop c

Diffusionc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Diffusion

Diffusion is a process whereby a substance redistributes from an area of relatively high concentration to an area of relatively low concentration due to random thermal motion. The larger the concentration gradient the faster diffusion occurs for a given temperature, conversely, the higher the temperature the faster diffusion occurs for a given concentration gradient.
has super-classes
Workshop c

Dry etchingc back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/DryEtching

Dry etching is a process whereby etching is accomplished by a reactive gas as opposed to a liquid. Dry etching techniques include plasma etch, reactive ion etch, magnetically enhanced reactive ion etch, inductively coupled plasma, electron spin resonance, etc.
has super-classes
Workshop c

Enhancement modec back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-PWR#Enhancement

A transistor that is normally open (off), but is triggered to close (on).
has super-classes
Operation mode c

Event calendarc back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/EventCalendar

An event calendar is an organized way to show the upcoming events based on calendar dates.
is in domain of
has capacity loss dp, has event calendar type dp, has mean time to failure dp, has mean time to failure distribution dp, has mean time to repair dp, has mean time to repair distribution dp
is in range of
has event calendar op

Implantationc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Implantation

Implantation or Ion Implantation is a technique where ions are accelerated to a higher energy and speed an injected into a semiconductor. The dominant techniques for introducing dopants into a semiconductor.
has super-classes
Workshop c

Lithographyc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Lithography

The lithography process is the key process in frontend. This consists of the following steps: a photo resisting layer is spun on a wafer, then exposed through the mask, then developed, then showing the effect on the open places, and then final deletion of the photo resisting material leaves only the remaining structure on the water. after some time for deposition, these steps are repeated up to 35 times.
has super-classes
Workshop c

Lot sizec back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/LotSize

A measure or quantity increment acceptable to or specified by the party offering to buy or sell. Used also as an alternative term for lot quantity.

Off-state regionc back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/Off-StateRegion

has super-classes
Region of operation c

On-state regionc back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/On-StateRegion

has super-classes
Region of operation c
has sub-classes
Cosntant resistance region c, Saturation region c

Operating propertyc back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/OperatingProperty

This class is used to represent operation and configuration aspects of devices.
has super-classes
property c
has sub-classes
Region of operation c, Switching frequency c, Threshold voltage c

Operating rangec back to ToC or Class ToC

IRI: http://www.w3.org/ns/ssn/systems/OperatingRange

Describes normal OperatingProperties of a System under some specified Conditions. For example, to the power requirement or maintenance schedule of a System under a specified temperature range. In the absence of OperatingProperties, it simply describes the Conditions in which a System is expected to operate.
has super-classes
property c

Operationc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Operation

The master entity “Operation” depicts the generic behavior of a single process step. Each operation has a foreign key relation to equipment and to route which means that the operation is required by the specific routes and requires a specific equipment. (workflow descriptive master entity).
is in domain of
This property is used to relate operations with their associated equipment and technologies. op, has P time per unit dp, has demand op, has equipment op, has event calendar op, has operation ID dp, has operation critical dp, has operation name dp, has processing time distribution dp, has rework operation dp, has rework probability lots dp, has rework probability wafers dp, has rework test dp, has route op, has sampling rate dp, has scrapping probability lots dp, has scrapping probability wafers dp, has scrapping test dp, has split lot chips dp, has split lots dp, has time constraints op, has unit dp, has variance p time dp, has workshop op
is in range of
has operation op

Operation modec back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/OperationMode

An operational situation/configuration of a system characterized by its active functions. Inside an operational mode the system can perform specific operational scenarios, and so activate the corresponding functions.
has sub-classes
Depletion mode c, Enhancement mode c

Product levelc back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/ProductLevel

In the "product level" entity, the aggregation of elements enables the grouping of products and defines the relationship between products and groups at different hierarchy levels. This supports planning, logistics, modeling, forecasting and reporting.

Production requestsc back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/ProductionRequests

Production requests definte what the facilities need to produce when and in what quantity.
is in range of
has demand op

Region of operationc back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/RegionOfOperation

The supply of suitable external dc voltage is called as biasing. Either forward or reverse biasing is done to the emitter and collector junctions of the transistor. These biasing methods make the transistor circuit to work in four kinds of regions such as Active region, Saturation region, Cutoff region and Inverse active region.
has super-classes
Operating property c
has sub-classes
Off-state region c, On-state region c

Routec back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Route

The master entity “Route” describes the structure of a workflow out of operations. Every product uses a specific route in its value stream, i.e. the complete sequence of operations with all mandatory and optional operations necessary to complete the product. A route makes use of the single operations. (workflow descriptive master entity).
is in domain of
has operation ID dp, has route name dp, has sequence number dp
is in range of
has route op

Saturation regionc back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/SaturationRegion

This is the region in which transistor tends to behave as a closed switch. The transistor has the effect of its collector and Emitter being shorted. The collector and Emitter currents are maximum in this mode of operation.
has super-classes
On-state region c

Simulation partc back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/SimulationPart

A simulation part helps to identify the same product in different locations. They are visible in Product Structures. This is a simulation entity and not a form of production/planning.
is in domain of
has route op
is in range of
has part op

Simulation routec back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/SimulationRoute

A simulation route (AKA workroute) represents a sequence of process steps in manufacutring (mainly at wafer fab). This is a simulation entity and not a form of production/planning.
is in domain of
has part op
is in range of
has route op

Sputteringc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Sputtering

The sputtering process, or physical vapor deposition (PVD) is the most used layering process today. Here gas atoms, mostly argon, strike out atoms from the cathode I an electric field which then form a thin film on the wafer surface.
has super-classes
Workshop c

Switching frequencyc back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/SwitchingFrequency

In electronics, switching frequency refers to the rate at which an electronic switch performs its function.
has super-classes
Operating property c

Technologyc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Technology

A semiconductor technology is a set of equipment, processes, manufacturing techniques and the related methods and procedures to enable the design & production of components, sub-components and modules.
is in domain of
has route op, has supply chain id dp
is in range of
This property is used to relate operations with their associated equipment and technologies. op

Threshold voltagec back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/ThresholdVoltage

The threshold voltage, commonly abbreviated as Vth, of a field-effect transistor (FET) is the minimum gate-to-source voltage VGS (th) that is needed to create a conducting path between the source and drain terminals. It is an important scaling factor to maintain power efficiency.
has super-classes
Operating property c

Time constraintsc back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/TimeConstraints

As single operations can set the lot to a time-critical state, time constraints can ensure that the operation setting it to an uncritical state is not delayed. Also the other case where certain time has to be spent between two operations can be covered with this master entity. (workflow deswcriptive master entities).
is in range of
has time constraints op

Wet etchingc back to ToC or Class ToC

IRI: http://www.purl.org/i4go/variant-domain/operation/WetEtching

Wet Etching is the process of removing material-etching, through the use of chemical activity.
has super-classes
Workshop c

Workshopc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Workshop

The overall organizational working structures within the fabs is described in the entity “Workshop”.
has sub-classes
Chemical polishing c, Deposition c, Diffusion c, Dry etching c, Implantation c, Lithography c, Sputtering c, Wet etching c
is in range of
has workshop op

Object Properties

has current WIPop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasCurrentWIP

This property is used to relate operations with their current WIP.
has super-properties
top object property
has domain
Event calendar c or Operation c
has range
Current WIP c

has demandop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasDemand

This property is used to relate operations with redundant demands and production requests.
has super-properties
top object property
has domain
Operation c
has range
Demand snapshot c
Production requests c

has equipmentop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasEquipment

Property used to relate operations with the equipment that perform them.
has super-properties
top object property
has domain
Operation c
has range
equipment
is inverse of
is equipment of op

has equipment groupop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasEquipmentGroup

This property is used to relate operations with the equipment groups that perform them.
has super-properties
top object property
has domain
Event calendar c or Operation c
has range
equipment group

has event calendarop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasEventCalendar

This property is used to relate operations with their event calendar.
has super-properties
top object property
has domain
Operation c
has range
Event calendar c

has lot sizeop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasLotSize

This property is used to relate operations with their lot size
has super-properties
top object property
has domain
Event calendar c or Operation c

has operating propertyop back to ToC or Object Property ToC

IRI: http://www.w3.org/ns/ssn/systems/hasOperatingProperty

Relation from an OperatingRange of a System to an OperatingProperty describing the operating range of the System.
has super-properties
top object property

has operationop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasOperation

This property is used to relate different entities (such as equipment) the the operations they perform.
has super-properties
top object property
has domain
equipment group or Demand snapshot c or Event calendar c or Current WIP c or Operation c
has range
Operation c
is inverse of
is operation of op

has partop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasPart

has super-properties
top object property
has domain
Simulation route c
has range
Simulation part c

has routeop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasRoute

This property is used to relate operations with their routes and simulation routes.
has super-properties
top object property
has domain
Simulation part c
Operation c
Technology c
has range
Simulation route c
Route c

has time constraintsop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasTimeConstraints

This class is used to relate operations with their time constraints.
has super-properties
top object property
has domain
Operation c
has range
Time constraints c

has workshopop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasWorkshop

This class is used to relate operations with their related working structures.
has super-properties
top object property
has domain
Operation c
has range
Workshop c

is equipment ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#isEquipmentOf

has super-properties
top object property
is inverse of
has equipment op

is operation ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#isOperationOf

has super-properties
top object property
is inverse of
has operation op

This property is used to relate operations with their associated equipment and technologies.op back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasTechnology

has super-properties
top object property
has domain
Operation c
has range
Technology c

Data Properties

has capacity lossdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasCapacityLoss

Calendar: Facility capacity loss in percent.
has super-properties
top data property
has domain
Event calendar c
has range
double

has event calendar typedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasEventCalendarType

Event Calendar: Type of event
has super-properties
top data property
has domain
Event calendar c
has range
string

has lot size quantitydp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasLotSizeQuantity

Lot Size: Standard (FE) or optimal (BE) lot size for respective PL3
has super-properties
top data property

has mean time to failuredp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasMeanTimeToFailure

Length of, or element of the length of, a temporal extent expressed in seconds
has super-properties
top data property
has domain
Event calendar c
has range
decimal

has mean time to failure distributiondp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasMeanTimeToFailureDistribution

has super-properties
top data property
has domain
Event calendar c
has range
string

has mean time to repairdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasMeanTimeToRepair

length of, or element of the length of, a temporal extent expressed in seconds
has super-properties
top data property
has domain
Event calendar c
has range
double

has mean time to repair distributiondp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasMeanTimeToRepairDistribution

has super-properties
top data property
has domain
Event calendar c
has range
string

has operation criticaldp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasOperationCritical

Operation: Is the Operation critical in terms of SC planning (a Bottleneck) or not?
has super-properties
top data property
has domain
Operation c
has range
boolean

has operation IDdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasOperationID

Operation identifier
has super-properties
top data property
has domain
Operation c
Route c
has range
string

has operation namedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasOperationName

Name of the operation.
has super-properties
top data property
has domain
Operation c
has range
string

has P time per unitdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasPTimePerUnit

Length of, or element of the length of, a temporal extent expressed in seconds
has super-properties
top data property
has domain
Operation c
has range
decimal

has processing time distributiondp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasProcessingTimeDistribution

has super-properties
top data property
has domain
Operation c
has range
string

has rework operationdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasReworkOperation

Rework Operation, if needed.
has super-properties
top data property
has domain
Operation c
has range
string

has rework probability lotsdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasReworkProbabilityLots

Operation: Probability of rework-tested full lots to be reworked.
has super-properties
top data property
has domain
Operation c
has range
double

has rework probability wafersdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasReworkProbabilityWafers

Operation: Probability of rework-tested wafers to be reworked.
has super-properties
top data property
has domain
Operation c
has range
double

has rework testdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasReworkTest

Operation: Are the processed lots tested for rework?
has super-properties
top data property
has domain
Operation c
has range
boolean

has route namedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasRouteName

Name of route (usually equals product names requiring the route).
has super-properties
top data property
has domain
Route c
has range
string

has sampling ratedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasSamplingRate

Sampling Rate: Execution rate of operation If operation is mandatory sampling rate is 1 (1- sampling rate = skipping rate of optional operation)
has super-properties
top data property
has domain
Operation c
has range
double

has scrapping probability lotsdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasScrappingProbabilityLots

Operation: Probability of scrapping-tested full lots to be scrapped.
has super-properties
top data property
has domain
Operation c
has range
double

has scrapping probability wafersdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasScrappingProbabilityWafers

Operation: Probability of scrapping-tested wafers to be scrapped.
has super-properties
top data property
has domain
Operation c
has range
double

has scrapping testdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasScrappingTest

Operation: Are the processed lots tested for scrapping?
has super-properties
top data property
has domain
Operation c
has range
boolean

has sequence numberdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasSequenceNumber

Lot Event: FK; Sequential number of the operation lot has entered
has super-properties
top data property
has domain
Route c
has range
integer

has split lot chipsdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasSplitLotChips

Split into lots with # chips, added due to data import
has super-properties
top data property
has domain
Operation c
has range
integer

has split lotsdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasSplitLots

Split into # lots, added due to data import
has super-properties
top data property
has domain
Operation c
has range
integer

has supply chain iddp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasSupplyChainID

Assignment of technology to supply chain.
has super-properties
top data property
has domain
Technology c
has range
string

has technologydp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasTechnologyID

Name of the technology
has super-properties
top data property

has unitdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasUnit

Unit, added due to data import
has super-properties
top data property
has domain
Operation c
has range
string

has variance p timedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hasVariancePTime

Length of, or element of the length of, a temporal extent expressed in seconds
has super-properties
top data property
has domain
Operation c
has range
decimal

Legend back to ToC

c: Classes
op: Object Properties
dp: Data Properties
ni: Named Individuals